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UV optical application system |
| The system based on the photochemical reaction using the deep UV light. The surface is to be improved by UV light and the precise cleaning system that eliminates oxidation of organic contaminant on the surface of substrate. Furthermore, the original standard enables to develop and fabricate UV lamp. |
Electrodeless high-power UV opto-irradiation system |
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| E-285W |
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| It is an eraser system using the electrodeless
high-power UV light. |
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Desktop-type deep UV surface cleaning system |
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| MUS-350HG |
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It is a compact desktop-type system aiming to eliminate the degradation of carbon compound, providing special low-pressure mercury lamp as a source of light.
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| UA-560W |
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| Since the organic contaminant is degraded by ultraviolet ray of short wavelength while the active oxygen accrued simultaneously vaporizes the contaminant, the ashing is even effective to the minute part where liquid is hard to go through. |
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Hard disk surface cleaning system |
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| HD-810 |
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The UV light source developed for manufacturing semiconductor is applied for the hard disk manufacturing. The technology of semiconductor grade can deal with the manufacturing of hard disk which is becoming detailed year by year.
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